Crystal Oscillator RELIABILITY OF QUARTZ OSCILLATOR 晶体振荡器的可靠性
A mixed monitor method was used in coating narrow band filter, maximum value monitor method for the reflected and interval layer, coupling layer by the method of quartz crystal oscillator, the outer layer was monitored by the method of quartz crystal oscillator and optical method. 窄带滤光片的膜厚控制采用的是一种混合的监控方法:用极值法监控反射层和间隔层,用石英晶振法监控耦合层,石英晶振法与光度法结合控制外层的增透层;