This paper describes the bulk silicon dissolved wafer process which has been employed to fabricate the micromechanical inertial instruments. 介绍了一种用以制造微机械惯性仪表(包括微陀螺和微加速度计)的微机械体加工方法&体硅溶解薄片法。
The fabrication techniques with dissolved wafer process of sensitive element are expressed. 叙述了敏感元件的体硅溶解薄片法制造工艺。
Through the reliability test, the NTC CUP process is suitable for thinner bond wire. So we can reduce the cost of the product which is lower driving current through wafer process change. 通过可靠性试验的研究发现,NTC的CUP工艺,在目前情况下只适用于线径较细的焊接工艺,因而可以对一些驱动电流较低的产品进行芯片工艺改进,降低芯片成本。
Study on fabrication of micromechanical inertial instruments with bulk silicon dissolved wafer process 采用薄片溶解工艺制造微机械惯性仪表的实验研究
This type of seal can achieve no-friction and good performance seal, hence it can meet the requirements of high vacuum without metal contaminate for the chamber in the wafer process. 这种密封能实现无摩擦、性能好的密封,能最大程度满足晶片处理过程中对靶室高真空度及金属颗粒的要求。