The prober is necessary role in wafer-level analysis of reliability. 在晶圆形式可靠度分析中,承载晶圆的探针台是不可或缺的。
Through the silicon bonding, we achieve a wafer-level vacuum package, and the wire-bonding PAD is made after the fabrication is complete. 在完成整体结构圆片级真空封装的同时,通过引线腔结构方便地实现了中间电极的引线。
Critical Success Factors for High-Volume Wafer-level Solder Ball Placement 大规模晶圆级(WL)焊球置放关键的成功因素
Development and Application of Modern Wafer-level Packaging Technology 现代圆片级封装技术的发展与应用
Moreover, some major processes package of MEMS, including wafer-level packaging, single-chip packaging, multi-chip packaging and stacked 3D packaging, etc were discussed. 阐述了MEMS的主要封装工艺和技术,包括圆片级封装、单芯片封装、多芯片组件和3D堆叠式封装等。