With the rapid development of micro electro mechanical system ( MEMS ), mechanical properties of MEMS are being focused. 随着微机电系统(MEMS)的蓬勃发展,如何准确获得MEMS材料的力学性能参数成为当今研究的热点。
As the rapid development of Micro Electro Mechanical Systems ( MEMS ), Computer Technology, and Communications Technology, a new kind of network system called Wireless Sensor Networks ( WSNs ) emerged. 随着微机电系统、计算机技术和通信技术的快速发展,出现了一种新型的网络系统,即无线传感器网络。
The rapid development of micro electro mechanical engineering, optics and photonics engineering, precision engineering, biomedical engineering and other fields urgently need the micro-enforcement agency which can micro-operation in the space of sub-millimeter, micron-level. 微机电工程、光学与光电子工程、精密工程、生物医学工程等领域的迅猛发展迫切需要能够在亚毫米级、微米级空间进行微操作的微执行机构。
With the rapid development of Micro Electro Mechanical System ( MEMS ) technology, Micro Inertial Measurement Unit ( MIMU ) based on MEMS technology is more and more mature. 随着微机电技术的飞速发展,基于微机电技术的微型惯性测量单元(MIMU)日渐成熟。
The rapid development of Micro Electro Mechanical Systems ( MEMS ) and Integrated MEMS ( IMEMS ) will inject new vitality and supply good opportunity for mechanics. Mechanics of intelligent microsystems studies the mechanical problem in smart microsystems ( including MEMS, IMEMS, MOEMS etc. ) 微电子机械系统(MEMS)和集成微电子机械系统(IMEMS)近年来的蓬勃发展将为力学学科注入新的活力并为其提供难得的发展机遇。