MEMS ( Micro Electronic Mechanical System(MEMS) ) accelerometers have wide applications in gauge check. MEMS加速度传感器在计量检测中有着广泛的应用。
This paper discusses the MEMS ( Micro Electronic Mechanical System(MEMS) ) safety device which is constructed by drivers, discriminator and energy-coupling element. 安全保险装置是用于保护“要害系统”安全性的器件。
The micromanipulation and microassembly technology is the important component of micro electronic mechanical system application. The research of micromanipulation control is very important to the application of micromanipulation. The Performance of control method and control effect directly influences on the precision and efficiency of micromanipulation. 微操作技术是微机电系统应用中重要的组成部分,研究微操作的控制问题对于微操作的应用具有重要的作用,控制方法和控制效果的好坏直接影响微操作的精确度和工作效率。
Study on a New Electromagnetic Micromotor in Micro Electronic Mechanical System(MEMS) 微电子机械系统(MEMS)中新型电磁微电机的研究
With the development of MEMS ( Micro Electronic Mechanical System(MEMS) ) technology, the application of micro-inertial sensors and measurement unit in navigation and guidance system become more and more widespread both at home and abroad. 随着微机电系统制造技术的发展,微惯性传感器及其组合测量单元在无人机的导航与控制系统中的应用越来越广泛。