XML Task Plan Language via XML for Microassembly Robot ABSTRACT Micro robotic technology is an important branch of MEMS ( Micro Electro Mechanical System(MEMS) ), as well as a hot spot in robotics. 摘要微操作机器人技术是微机电系统(MEMS)技术的一个重要分支,也是当前机器人控制领域的一个热点。
Micro Electro Mechanical System(MEMS) and System on a Chip 微电子机械系统和片式系统
With the development of the Micro Electro Mechanical System(MEMS) ( MEMS ), mico-machining technologies grows rapidly. 微机电系统(MEMS)(MEMS)的发展,带动了微细加工技术的发展。
The significance and necessity for developing the study on modeling and simulation of micro electro mechanical system ( MEMS ) were resumed. 概述了开展微型机电系统(MEMS)建模与仿真研究的意义和必要性。
Research of the Experimental Modelling for the Micro Electro Mechanical System(MEMS) 微机电系统(MEMS)实验建模研究