Individual sputtering angular distributions and partial sputtering yields of Ni and Pd from Ni-Pd alloy have been measured at different temperatures, by using the Rutherford back-scattering spectrometry ( RBS ). 用卢瑟福背散射(RBS)技术,测定了NiPd(48.2wt%Pd)合金在不同温度时的溅射原子角分布,从而确定了Ni和Pd原子的部分产额随样品温度的变化关系。