Development of a MEMS Electrical Inertia Micro-switch Based on Non-silicon Substrate 基于非硅衬底的微机电系统惯性开关的研制
The micro-switch is located behind the left side-panel lining. 微动开关位于左侧板衬里后方。
All models are equipped with key locks and micro-switch to cut out fan operation and light up the lamp when the door is opened. 全部雪柜型号配销,打开门时,雪柜亮橙,另有微型开关(MS)停止蒸发器风扇转动,减少冷量往外流失。
Two typical MEMS devices, Micro-Switch(MS) and Micro-Mirror, are designed, including structure, process and driving principle. 设计了两种典型的MEMS器件微开关和微镜,包括结构和工艺,以及它们的驱动原理,对两种器件的加工工艺进行了详细的阐述。
The results demonstrate that the micro-switch optimized can be applied to system on chip. 结果表明,经优化后的压电薄膜微开关可进一步应用到集成化芯片系统中。