The outlet pressure of all those pumps were not lower than 0.1 Torr, and it follows that those pumps can run well by using directly the mechanical vacuum pumps as backing pumps without booster pump used. 所有这些泵的最大出口压力不低于0.1Torr,因此前级泵可直接用机械真空泵,不必用增压泵即能正常工作。
This paper describes a direct drive and oil-free mechanical vacuum pump of model WY-6 Its main performance characteristic and test results are described and discussed and the residual gas composition in booster stage is given. 本文介绍了我所研制成功的WY-6直联式无油机械真空泵。文中主要阐述了对该泵各项性能的测试结果与分析,并对增压级的残余气体进行了质谱分析。