Using ICP method, we have prepared the low K fluorocarbon films and carried out research on the characteristics of the discharge of the fluorocarbon gas, the behavior of the fluorocarbon radicals and the growth mechanism of films. 本文率先在国内使用ICP制备了低K氟化非晶碳薄膜,研究了碳氟等离子体的放电行为、碳氟等离子体中的各种基团的空间行为以及碳氟薄膜的生长机理。
Low temperature plasma technique with fluorocarbon compounds atmosphere is the latest development for surface modification of various materials. Through introducing fluoro group to the surface of the matrix by plasma treatment, the matrix features low surface energy and many special properties. 介绍了以氟碳化合物为气氛的低温等离子体技术进行各种材料的表面改性的最新进展,指出等离子体技术可在各种材料表面引入含氟基团,以获得低能表面,从而使材料获得各种特殊的性能。
Study on Low Surface Energy and Corrosion and Weather Resistance Fluorocarbon Coating 低表面能防腐耐候氟碳涂料的研究
With the advantage of low pressure, high density and sufficient uniformity, inductively coupled fluorocarbon plasma was widely studied for the decreasing in the dimension of the devices, the increasing of the substrate. 由于器件特征尺寸的不断缩小和加工基片面积的加大,具有运行气压低、密度高、大面积均匀等优点的感应耦合等离子体(ICP)得到了人们广泛的关注。