X-rays, as a new radiation source, has the advantages such as safety, precise control of dose rate, strong intensity, possibility of wafer-level test or even on - line test, which greatly reduce cost for package, test and transportation. X射线作为辐射源具有安全、剂量率控制准确等优点,可进行硅片级的测试甚至在线测试,从而大大降低封装、测试、运输的成本,提高研发效率。
Standard wafer-level electromigration acceleration test ( SWEAT ); 标准圆片级电迁移加速测试技术;