A Study on the Temperature Coefficient of Sensitivity Self-compensation Technology of Polysilicon Pressure Sensor 多晶硅压力传感器灵敏温度系数自补偿技术研究
In sample experiments by using lubricant oil, it is showed that the sensor's zero temperature coefficient, sensitivity temperature coefficients, temperature stability and measurement precision compared with results before information-fusion processing were greatly improved. 对传感器用机油进行实验的结果表明:传感器的零位温度系数、灵敏温度系数、温度的稳定性及测量精度与未进行信息融合前相比均有较大的提高。
This gyro is proved to have high sensitivity and low temperature coefficient of sensitivity ( TCS ) by a piezoresistance on chip self-compensation feedback. 不但灵敏度比较高,而且能实现压阻系数的片上温度自补偿。
The capacitive micro-accelerometer has been commonly used due to their high accuracy, low drift, low power dissipation, low noise, low temperature coefficient and high sensitivity characteristics. 微电容式加速度计因具有精度高、噪声特性好、漂移低、温度敏感性小、功耗低等优点而得到广泛应用。
Characterization of the temperature coefficient of force sensitivity of quartz crystal resonator 石英谐振器力灵敏度温度系数特性分析