Single crystal silicon wafer has been widely used in the semiconductor industry, as the basic substrate material for the integrated circuits. Ultra-precision grinding technology is the core technology of a semiconductor chip substrate planarization processing and back thinned processing. 单晶硅是优良的衬底材料,被广泛应用于半导体产业中,超精密磨削技术是半导体芯片衬底平坦化加工和背面减薄加工的核心技术。