Presents a current standard for high-class microelectronic clean rooms. Tests a high class building of class 1 with grade 0.1 μ m. Summarizes the required testing items, procedures and apparatus in such a factory. 介绍了与超高级别微电子洁净厂房有关的分级标准,并对某0.1μm1级洁净厂房作了实际测试,给出测试项目、测试方法和使用的主要测试仪器。