This paper studied experimentally the influences of processing steps of UV-LIGA, including before post exposure bake, exposure, development, resist removal, micro electroforming, on the quality of micro-structures micro-devices fabricated on metal-substrate, and optimized their operation conditions and processing parameters. 试验研究了UV-LIGA各工艺环节(包括前后烘(PEB)、曝光、显影、去胶、电铸等)对金属基片上制造金属微结构器件质量的影响,并组合优化了操作条件和工艺参数。
In this chapter we will use the post exposure bake method to solve the satellite defect. 本章节就是对曝光后光酸烘烤反应入手解决此缺陷。