This system applying high precision Mass Flow Controller(MFC) ( MFC ) can be used for confecting kinds of low concentration standard gas, to supply standard gas for industry and science research. 该系统采用了高精度的质量流量控制器(MFC),可用于配制各种低浓度的标准气体,以满足工业应用和科学研究中标准气体的需求。
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. 质量流量控制器(MFC)的性能可能易受在与控制流体流动的控制器耦合的流动路径中的压力瞬变现象的影响。
The thermal sensor had a large lag phase, so the data got by the sensor of digital mass flow controller should be compensated in advance. 热式传感器有很大的滞后环节,在数字质量流量控制器(MFC)中需要对传感器数据进行补偿。
The accurate control of flow is achieved by adopting Mass flow controller. 以质量流量控制器(MFC)为测控器件,实现了对保护气体流量及浓度的精确控制。
The paper introduces the research background of Mass Flow Controller(MFC), and analyzes the performance index of its hardware, gives the procedures of the design. 文章首先介绍了质量流量控制器(MFC)的研究现状,分析了其硬件的性能指标,给出了控制器设计的方案和步骤。