Si concave microlenses array Ar ion beam etching. 标签Si凹微透镜阵列氩离子束刻蚀(IBE)。
The16-step Fresnel lens had been fabricated by thin film deposition and ion beam etching and it has been used in refractive-diffractive CCD camera. 使用薄膜沉积法和离子束刻蚀(IBE)法制作16阶菲涅耳透镜,应用于折衍混合CCD相机。
Study on step sidewall tilt in ion beam etching of Fresnel lens 离子束刻蚀(IBE)过程中台阶侧壁倾斜现象研究
Acceptable Error of Etching Depth in Ion Beam Etching(IBE) Microlens 离子束蚀刻微透镜中蚀刻深度允许误差的研究
Fabrication of 128 × 128 Area Silicon Field Emission Arrays Using Ar Ion Beam Etching(IBE) 128×128元硅场发射阵列的氩离子束刻蚀(IBE)制作