Fixed Quality Area(FQA) ( FQA ) - The area that is most central on a wafer surface. 质量保证区(QA)-晶圆片表面中央的大部分。
Edge Exclusion, Nominal ( EE ) - The distance between the fixed quality area and the periphery of a wafer. 边缘排除区域-位于质量保证区和晶圆片外围之间的区域。(根据晶圆片的尺寸不同而有所不同。)